2013-7-7??顶栅 IGZO TFT研究现状迟世鹏201378主要内容顶栅IGZO TFT栅介质沟道保护层IGZO薄膜厚度双沟道光照自对准工艺Al反应法顶栅IGZO TFT(a)Thin-Film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor (b)Room-temperature fa