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晶体生长计算软件FEMAG之Dynamic Simulation of the Entire Crystal Growth Process: Multi-Scale Analysis of Melt Flow TransientsV. Regnier L. Wu B. DelsauteF. Bioul N. Van den Bogaert F. DupretCESAME Université ca
单击此处编辑母版标题样式单击此处编辑母版文本样式第二级第三级第四级第五级FEMAG晶体生长建模软件-建模策略Fran?ois Dupret12 Roman Rolinsky2 Brieuc Delsaute2 Rajesh Ramaya2 Nathalie Van den Bogaert2 1 Université catholique de Louvain Louvain-la-N
FEMAG晶体生长专业模拟软件Czochralski (CZ) Process(FEMAG-CZ) FEMAG直拉法模拟软件(FEMAG-CZ)用于模拟直拉法工艺(包括Cz MCz VCz泡生法)?FEMAG-CZ直拉法模拟软件用于新的热场设计并研发新的方法以满足新的商业需求点比如:大直径晶锭生长无缺陷硅晶锭生长 提高成品率氧含量控制降低碳含量晶锭半径和沿轴向的电阻率差异减小CCZ工艺仿真磁
edit the title text formatCUSP磁场对8英寸半导体级硅晶体生长的影响ReportBruker ASCFeb 9 2012PREDICTION OF RADIAL OXYGEN CONCENTRATIONCUSP vs NOCUSP - CARBON CONCENTRATION - CRYSTALNOCUSP vs CUSP - OXYGEN IN THE MELT A
单击此处编辑母版标题样式单击此处编辑母版文本样式第二级第三级第四级第五级FEMAG晶体生长模拟软件Global Simulation of Czochralski Silicon Growth under the Effectof a Transverse Magnetic FieldFEMAGSoft ? 2013Cz Si growth under a TMF MHD boundary lay
全球半导体晶体生长模拟著名商业软件FEMAGOptimization of Silicon Ingot Quality by the Numerical Prediction of Bulk Crystal DefectsF. Loix2 F. Dupret12 A. de Potter2 R. Rolinsky2 W. Liang2 N. Van den Bogaert21CES
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