Click to edit Master title styleClick to edit Master text stylesSecond levelThird levelFourth levelFifth levelPVD CVD ElectrochemDeposition1Overview 4 processes Physical Vapor Deposition (PVD) Chemic
单击此处编辑母版标题样式单击此处编辑母版文本样式第二级第三级第四级第五级一薄膜的制备★薄膜生长:热氧化★薄膜淀积(沉积): PVD(Physical Vapor-phase Deposition) 物理气相淀积(蒸发溅射) CVD(Chemical Vapor-phase Deposition ) 化学气相淀积(APCVDLPCVD